Fault modeling of electrostatic comb-drives for MEMS

Benoit Charlot; Spiridon Moussouris; Salvador Mir; Bernard Courtois

doi:10.1117/12.341226

10 March 1999 Fault modeling of electrostatic comb-drives for MEMS

Benoit Charlot, Spiridon Moussouris, Salvador Mir, Bernard Courtois

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341226
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

The work described in this paper is aimed at fault modeling and fault simulation of electrostatic comb-drives. At present, we have taken into account the most typical defects which we have encountered through fabrication of resonator test structures. These defects include stiction of the suspended beams to the substrate surface and the break of comb-drive model, and the impact of a faulty comb-drive is assessed for different resonator-based designs.

Citation Download Citation

Benoit Charlot, Spiridon Moussouris, Salvador Mir, and Bernard Courtois "Fault modeling of electrostatic comb-drives for MEMS", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341226

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