Fault simulation of MEMS using HDLs

Benoit Charlot; Salvador Mir; Erika F. Cota; Marcelo Lubaszewski; Bernard Courtois

doi:10.1117/12.341215

10 March 1999 Fault simulation of MEMS using HDLs

Benoit Charlot, Salvador Mir, Erika F. Cota, Marcelo Lubaszewski, Bernard Courtois

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341215
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

This paper describes an approach to fault simulation of MEMS using an analog Hardware Description Language (HDL). HDL languages facilitate the description of mixed-domain devices, providing powerful representation capabilities which are not limited to the use of the traditional equivalent electrical modes. This is exploited in this paper for fault simulation of MEMS, showing the advantages of using an HDL for this task. An electro-thermal converter is used as test vehicle, for which an equivalent electrical more is readily obtained. Typical defects and failure mechanisms which can affect these devices fabricated using CMOS-compatible bulk micromachining are shown. These defects are used for illustrating the fault simulation approach which appears to be more comprehensive and systematic than previous approaches.

Citation Download Citation

Benoit Charlot, Salvador Mir, Erika F. Cota, Marcelo Lubaszewski, and Bernard Courtois "Fault simulation of MEMS using HDLs", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341215

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available