High-spatial-frequency grating technology for microsystem applications

Olivier M. Parriaux; Florent Pigeon; Y. Jourlin; Alain Mure-Ravaud; Alexandre V. Tishchenko

doi:10.1117/12.341255

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10 March 1999 High-spatial-frequency grating technology for microsystem applications

Olivier M. Parriaux, Florent Pigeon, Y. Jourlin, Alain Mure-Ravaud, Alexandre V. Tishchenko

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Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341255
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

A sub-micron grating can be the key miniaturized planar element in Micro-opto-electromechanical systems where it performs a number of optical functions such as light routing, beam splitting, spectral-analysis, polarization filtering, beam recombination, spatial resonance excitation, in the domains of displacement measurement, biochemical sensors, environment monitoring, laser emission control, WDM communications, to quote a few current applications. This paper will describe the main stream technology of sub-micron gratings and illustrate its application potential.

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Olivier M. Parriaux, Florent Pigeon, Y. Jourlin, Alain Mure-Ravaud, and Alexandre V. Tishchenko "High-spatial-frequency grating technology for microsystem applications", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341255

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