MEMS resonator synthesis for testability

Nilmoni Deb; Sitaraman V. Iyer; Tamal Mukherjee; Ronald D. Shawn Blanton

doi:10.1117/12.341153

10 March 1999 MEMS resonator synthesis for testability

Nilmoni Deb, Sitaraman V. Iyer, Tamal Mukherjee, Ronald D. Shawn Blanton

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341153
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

We combine our MEMS synthesis and test capabilities into a synthesis-for-test environment. A microresonator design meeting a variety of specifications is synthesized. The susceptibility of this design is then measured using our MEMS contamination analyzer. The nature of each defective microresonator is determined and the deviation form nominal performance is correlated to the bounds and design constraints used in the synthesis process. Feedback from this analysis is formulated into additional design constraints for the synthesis tool with the object of minimizing the impact of spot contaminations. Re-synthesis of the same designs using these additional constraints indicates that a certain class of catastrophic and parametric faults can be reduced by 25 percent without sacrificing performance.

Citation Download Citation

Nilmoni Deb, Sitaraman V. Iyer, Tamal Mukherjee, and Ronald D. Shawn Blanton "MEMS resonator synthesis for testability", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341153

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