Modeling and simulating optical MEMS using Chatoyant

Timothy P. Kurzweg; Steven Peter Levitan; Philippe J. Marchand; Jose A. Martinez; Kurt R. Prough; Donald M. Chiarulli

doi:10.1117/12.341207

10 March 1999 Modeling and simulating optical MEMS using Chatoyant

Timothy P. Kurzweg, Steven Peter Levitan, Philippe J. Marchand, Jose A. Martinez, Kurt R. Prough, Donald M. Chiarulli

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341207
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

The use of MEMS technology has enabled the fabrication of micro-optical and micro-electro-mechanical systems on a common substrate. This has led to new challenges in computer aided design of optical micro-electro-mechanical systems. We have extended our opto-electronic system DAD tool, Chatoyant, to attempt to meet the needs to optical MEMS designers. This paper present new component models and analysis techniques which extend our tool to support optical MEMS design. We demonstrate these extensions with the analysis of a micro-optical high speed FT engine and a 1 by 2 optical MEM interferometer switch.

Citation Download Citation

Timothy P. Kurzweg, Steven Peter Levitan, Philippe J. Marchand, Jose A. Martinez, Kurt R. Prough, and Donald M. Chiarulli "Modeling and simulating optical MEMS using Chatoyant", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341207

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