Needle-shaped glucose sensor with multicell electrode fabricated by surface micromachining

Youn Tae Kim; Young-Yong Kim; Chi-Hoon Jun

doi:10.1117/12.341159

10 March 1999 Needle-shaped glucose sensor with multicell electrode fabricated by surface micromachining

Youn Tae Kim, Young-Yong Kim, Chi-Hoon Jun

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341159
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

A needle-shape glucose sensor for in-situ glucose monitoring has been fabricated by surface micromachining and its characteristics were examined. The sensor consists of the needle-shaped sensing part, metal lines and pads to supply a bias voltage and measure the cell current. The sensing part is seated at the end of the needle, and it has three or four working electrodes, a counter electrode, and a reference electrode. A SOI wafer was used as a substrate and a metal layer was deposited to improve bending characteristics of the sensor as a reinforced layer. A Ti/Pt layer is deposited on the thermally oxidized layer and patterned to form cells, electrodes, and metal lines. A Ag/AgCl layer was added to form the reference electrode. And then, the edge of the sensor structure was defined and etched to form the needle shape, and the windows of the cells and the electrodes were opened using wet and dry etching. Finally, a sacrificial oxide layer was removed using wet and gas phase etching and the apparent shape of the sensor was accomplished. The needle shaped microelectrode for the glucose sensor exhibits chemically stable characteristics, and the glucose concentration-dependent oxidation current of hydrogen peroxide produced by the conversion of glucose and oxygen at the working electrode, were measured.

Citation Download Citation

Youn Tae Kim, Young-Yong Kim, and Chi-Hoon Jun "Needle-shaped glucose sensor with multicell electrode fabricated by surface micromachining", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341159

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