Production of novel 3D microstructures using excimer laser mask projection techniques

Nadeem Hasan Rizvi

doi:10.1117/12.341245

10 March 1999 Production of novel 3D microstructures using excimer laser mask projection techniques

Nadeem Hasan Rizvi

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341245
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

Excimer laser ablation is used in conjunction with mask projection techniques to produce novel and complex microstructures. Special multiple-mask techniques have been developed which, together with synchronized workpiece motion and laser firing, are used for the manufacture of features such as micro-channels, ramps, contoured surfaces with channels etc. These new techniques allow planar microstructures to be combined and superimposed onto curved or multifaceted shapes, thereby enabling hitherto unobtainable structures to be produced. Details are given of the techniques used along with examples of the types of structures which have been produced.

Citation Download Citation

Nadeem Hasan Rizvi "Production of novel 3D microstructures using excimer laser mask projection techniques", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341245

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