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30 December 1998 Soft x-ray plasma source pumped by an excimer laser: optimization and applications
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Abstract
A large volume excimer laser, HERCULES, has been successfully applied as pump for a soft x-ray plasma source. The laser pulse duration has been varied from the natural value of 120 ns down to 10 ns, reaching different emission spectra from the plasma which have resulted to be optimum for different applications of the plasm source itself. Some experimental results on the applications of the source to different fields are presented; the choice of the best laser parameters in relation to the applications of the plasma source are also discussed.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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