Paper
20 January 1999 Application of lasers in diamond film processing
Miroslav Michalka, Frantisek Uherek, A. Kromka
Author Affiliations +
Proceedings Volume 3688, 6th International Conference on Industrial Lasers and Laser Applications '98; (1999) https://doi.org/10.1117/12.337534
Event: 6th International Conference on Industrial Lasers and Laser Applications '98, 1998, Shatura, Moscow Region, Russian Federation
Abstract
In the paper a review of the present state of the application of laser technology in diamond films processing is presented. Possibilities of laser stimulation of nucleation process on substrate surface for growth of continuous diamond films and laser deposition of diamond films are discussed. Application of laser radiation for diamond and diamond-like films processing and modification of physical and optical properties of diamond films by laser treatment are analyzed. The first results of diamond films preparation and characterization are presented.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Miroslav Michalka, Frantisek Uherek, and A. Kromka "Application of lasers in diamond film processing", Proc. SPIE 3688, 6th International Conference on Industrial Lasers and Laser Applications '98, (20 January 1999); https://doi.org/10.1117/12.337534
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KEYWORDS
Diamond

Laser processing

Chemical vapor deposition

Carbon

Laser ablation

Raman spectroscopy

Silicon

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