Femtosecond laser-pulse nanolithography using an STM tip

Yurii E. Lozovik; D. V. Lisin; Arkadi I. Ivanov; V. O. Kompanets; Yu. A. Matveets; Sergey V. Chekalin; S. P. Merkulova

doi:10.1117/12.342383

15 March 1999 Femtosecond laser-pulse nanolithography using an STM tip

Yurii E. Lozovik, D. V. Lisin, Arkadi I. Ivanov, V. O. Kompanets, Yu. A. Matveets, Sergey V. Chekalin, S. P. Merkulova

Proceedings Volume 3734, ICONO '98: Fundamental Aspects of Laser-Matter Interaction and New Nonlinear Optical Materials and Physics of Low-Dimensional Structures; (1999) https://doi.org/10.1117/12.342383
Event: ICONO '98: Laser Spectroscopy and Optical Diagnostics: Novel Trends and Applications in Laser Chemistry, Biophysics, and Biomedicine, 1998, Moscow, Russian Federation

Abstract

The new nanolithography technique realized experimentally using the local field of femtosecond laser pulses enhanced in nanoscale region due to lighting rod effect and to the excitation of local resonances in STM tip--substrate system. Surface topography analysis in STM mode demonstrates the controlled surface modification in a suitable regime of intensity parameters and femtosecond laser pulses focusing in the STM tip region.

Citation Download Citation

Yurii E. Lozovik, D. V. Lisin, Arkadi I. Ivanov, V. O. Kompanets, Yu. A. Matveets, Sergey V. Chekalin, and S. P. Merkulova "Femtosecond laser-pulse nanolithography using an STM tip", Proc. SPIE 3734, ICONO '98: Fundamental Aspects of Laser-Matter Interaction and New Nonlinear Optical Materials and Physics of Low-Dimensional Structures, (15 March 1999); https://doi.org/10.1117/12.342383

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available