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15 March 1999 Femtosecond laser-pulse nanolithography using an STM tip
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Proceedings Volume 3734, ICONO '98: Fundamental Aspects of Laser-Matter Interaction and New Nonlinear Optical Materials and Physics of Low-Dimensional Structures; (1999) https://doi.org/10.1117/12.342383
Event: ICONO '98: Laser Spectroscopy and Optical Diagnostics: Novel Trends and Applications in Laser Chemistry, Biophysics, and Biomedicine, 1998, Moscow, Russian Federation
Abstract
The new nanolithography technique realized experimentally using the local field of femtosecond laser pulses enhanced in nanoscale region due to lighting rod effect and to the excitation of local resonances in STM tip--substrate system. Surface topography analysis in STM mode demonstrates the controlled surface modification in a suitable regime of intensity parameters and femtosecond laser pulses focusing in the STM tip region.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yurii E. Lozovik, D. V. Lisin, Arkadi I. Ivanov, V. O. Kompanets, Yu. A. Matveets, Sergey V. Chekalin, and S. P. Merkulova "Femtosecond laser-pulse nanolithography using an STM tip", Proc. SPIE 3734, ICONO '98: Fundamental Aspects of Laser-Matter Interaction and New Nonlinear Optical Materials and Physics of Low-Dimensional Structures, (15 March 1999); https://doi.org/10.1117/12.342383
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