Laser nanointerferometry of displacement: methods and means of measurement accuracy improvements

Valery P. Kiryanov

doi:10.1117/12.340147

25 February 1999 Laser nanointerferometry of displacement: methods and means of measurement accuracy improvements

Valery P. Kiryanov

Proceedings Volume 3736, ICONO '98: Quantum Optics, Interference Phenomena in Atomic Systems, and High-Precision Measurements; (1999) https://doi.org/10.1117/12.340147
Event: ICONO '98: Laser Spectroscopy and Optical Diagnostics: Novel Trends and Applications in Laser Chemistry, Biophysics, and Biomedicine, 1998, Moscow, Russian Federation

Abstract

The state of the art of the problem for the laser- interferometer transducer resolution increase is discussed. It is noted that the element basis of transducer electronic systems, allows achievement of resolution approximately (lambda) /1024 (or 0.6nm). The problems of accuracy providing the interferometric displacement transformation are analyzed by the example of the control system creation for the precision air bearing table of the laser pattern generator with submicron resolution. The peculiarities of this task solution caused the presence of inner heat and turbulence sources are considered. Examples of the known technical methods for solution of this problem are shown.

Citation Download Citation

Valery P. Kiryanov "Laser nanointerferometry of displacement: methods and means of measurement accuracy improvements", Proc. SPIE 3736, ICONO '98: Quantum Optics, Interference Phenomena in Atomic Systems, and High-Precision Measurements, (25 February 1999); https://doi.org/10.1117/12.340147

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