Optical and mechanical properties of diamondlike carbon produced by dual ion beam sputtering technique

Salvatore Scaglione; Francesca Sarto; Raffaele Pepe; Antonella Rizzo; Marco Alvisi

doi:10.1117/12.360129

7 September 1999 Optical and mechanical properties of diamondlike carbon produced by dual ion beam sputtering technique

Salvatore Scaglione, Francesca Sarto, Raffaele Pepe, Antonella Rizzo, Marco Alvisi

Proceedings Volume 3738, Advances in Optical Interference Coatings; (1999) https://doi.org/10.1117/12.360129
Event: Optical Systems Design and Production, 1999, Berlin, Germany

Abstract

The diamond like carbon (DLC) is very hard, inert to chemical attack and transparent in the IR region. In order to increase the transparency of DLC, the percentage of Sp³ bonds must be increased. In this work, thin film of DLC were deposited by the Dual Ion Beam Sputtering technique. An argon ion beam sputters a graphite target and a second one assists the film during the growth. A set of samples were produced at different momentum transfer varying the energy and current density of assisting ion beam and the growth rate. The momentum transfer is defined P equals n_c divided by n_at (root) 2 m_c E_c where n_c is the number of recoiling carbon atoms, m_at is the number of the carbon atoms in the volume interested at the collision cascade process and E_c is the energy of the recoils after the collision with the Ar ions, n_c, n_at, and E_c were calculated by the TRIM program. THe optical properties as the optical gap of the samples were related to the momentum transfer value. As far as the mechanical properties were concerned, the hardness value was measured by Knoop microindentation for all samples.

Citation Download Citation

Salvatore Scaglione, Francesca Sarto, Raffaele Pepe, Antonella Rizzo, and Marco Alvisi "Optical and mechanical properties of diamondlike carbon produced by dual ion beam sputtering technique", Proc. SPIE 3738, Advances in Optical Interference Coatings, (7 September 1999); https://doi.org/10.1117/12.360129

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