UV-optical and microstructural properties of MgF2-coatings deposited by IBS and PVD processes

Detlev Ristau; Winfried Arens; Salvador Bosch; Angela Duparre; Enrico Masetti; Damien Jacob; George Kiriakidis; Francesca Peiro; Etienne Quesnel; Alexander V. Tikhonravov

doi:10.1117/12.360111

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7 September 1999 UV-optical and microstructural properties of MgF₂-coatings deposited by IBS and PVD processes

Detlev Ristau, Winfried Arens, Salvador Bosch, Angela Duparre, Enrico Masetti, Damien Jacob, George Kiriakidis, Francesca Peiro, Etienne Quesnel, Alexander V. Tikhonravov

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Proceedings Volume 3738, Advances in Optical Interference Coatings; (1999) https://doi.org/10.1117/12.360111
Event: Optical Systems Design and Production, 1999, Berlin, Germany

Abstract

In high quality otpical coating systems for the DUV-spectral range, MgF₂ is one of the preferred deposition materials. MgF₂-coatings exhibit relatively low optical losses as well as high stability and laser induced damage thresholds. In the present joint research effort of several European laboratories, the potentiality of MgF₂ is evaluated in respect to the production of improved optical coatings for applications in laser technology and semiconductor lithography. For this purpose, single layers of MgF₂ were deposited on superpolished fused silica and CaF₂-substrates by ion beam sputtering, boat and e-beam evaporation in different laboratories. Besides photometric inspections, the samples were characterized by an optical scatter measurement facility at 193 nm and 633 nm. The structural properties were assessed using AFM, XRD, and adapted TEM-techniques invovling conventional thinning methods for the layers. For the measurement of mechanical stress in the coatings, special silicon substrates were coated and analyzed.

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Detlev Ristau, Winfried Arens, Salvador Bosch, Angela Duparre, Enrico Masetti, Damien Jacob, George Kiriakidis, Francesca Peiro, Etienne Quesnel, and Alexander V. Tikhonravov "UV-optical and microstructural properties of MgF₂-coatings deposited by IBS and PVD processes", Proc. SPIE 3738, Advances in Optical Interference Coatings, (7 September 1999); https://doi.org/10.1117/12.360111

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