Excimer laser fabrication and optical properties of polymer prismatic microstructures

Patrice A. Topart; Daniel Plessis; Eric Monterrat; Pierre Coquard; Herve Piombini

doi:10.1117/12.360144

6 September 1999 Excimer laser fabrication and optical properties of polymer prismatic microstructures

Patrice A. Topart, Daniel Plessis, Eric Monterrat, Pierre Coquard, Herve Piombini

Proceedings Volume 3739, Optical Fabrication and Testing; (1999) https://doi.org/10.1117/12.360144
Event: Optical Systems Design and Production, 1999, Berlin, Germany

Abstract

This paper reports on the fabrication of prismatic microstructures on polymer films by a combination of KrF laser micromachining and hot embossing. Typical values of depth and pitch of prisms lie between 50 and 200 micrometers . Optical properties of such polymer surface sin the mid-IR are based on a geometrical optics mechanism. The UV ablation of V channels is achieved by projecting a (Delta) shaped mask onto the workpiece. Both poly(methylmethacrylate) and polyimide plates were machined. THe dependence of depth of grooves on mask shape, laser fluence, ablation rate of material, positioning table velocity and process gas has been investigated for both polymers. At 248 nm, the higher ablation rate of PMMA as compared to polyimide result in a close to 10-fold reduction in processing time. IR transparent polyethylene, films were replicated by hot embossing of either the polyimide master or a nickel shim electroformed on PMMA. Surface profilometry, optical microscopy and SEM measurements revealed that embossed PE replicas were produced with high fidelity. The angular distribution of IR transmissivity of the PE surface relief has been measured at 10.6 micrometers . Experimental results were compared to those calculated.

Citation Download Citation

Patrice A. Topart, Daniel Plessis, Eric Monterrat, Pierre Coquard, and Herve Piombini "Excimer laser fabrication and optical properties of polymer prismatic microstructures", Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); https://doi.org/10.1117/12.360144

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available