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6 September 1999 Phase-step calibration
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Abstract
An effective method to obtain the phase distribution is to use phase stepped interferometry. By recording a number of interferograms, all having a different phase step between the interfering beams, the phase distribution can be calculated. The accuracy of the phase distribution depends strongly on the accuracy of the applied phase step, i.e. the change in phase difference between the interfering beams. A novel scheme is presented that yields the change in phase difference between two recordings. It is shown that the calculation of the correlation between the two recording can directly be used to obtain the difference in phase stp between the two recordings. The accuracy in the obtained phase step value is better than 0.1 percent for all commonly used phase steps.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hedser H. van Brug "Phase-step calibration", Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); https://doi.org/10.1117/12.360151
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