Wide-scale surface characterization by combination of scanning force microscopy, white light interferometry, and light scattering

Stefan Gliech; Angela Duparre; Rolf-Juergen Recknagel; Gunther Notni

doi:10.1117/12.360166

6 September 1999 Wide-scale surface characterization by combination of scanning force microscopy, white light interferometry, and light scattering

Stefan Gliech, Angela Duparre, Rolf-Juergen Recknagel, Gunther Notni

Author Affiliations +

Proceedings Volume 3739, Optical Fabrication and Testing; (1999) https://doi.org/10.1117/12.360166
Event: Optical Systems Design and Production, 1999, Berlin, Germany

Abstract

A variety of technical applications require surface roughnesses to be measured and characterized over a wide range of scale. Therefore, it is inevitable to combine different measurements methods, both optical and nonoptical. In this paper, we present results of white light interferometry, atomic force microscopy, and angle resolved scattering. In addition we use total scattering to control the surface roughness and its inhomogeneities over large sample areas. Power spectral density functions are used to combine the roughness data obtained from the measurements over difference scales and to characterize the surface by means of model PSDs. We present results from different statistically rough surfaces, such as quartz and black glass, Si-wafers, and polished brass surfaces.

Citation Download Citation

Stefan Gliech, Angela Duparre, Rolf-Juergen Recknagel, and Gunther Notni "Wide-scale surface characterization by combination of scanning force microscopy, white light interferometry, and light scattering", Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); https://doi.org/10.1117/12.360166

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