Accurate measurement of the flatness of etalons

Shin-ichi Itoh; Kentaro Katoh; Tsuyoshi Oikawa; Jun Chen

doi:10.1117/12.347756

7 May 1999 Accurate measurement of the flatness of etalons

Shin-ichi Itoh, Kentaro Katoh, Tsuyoshi Oikawa, Jun Chen

Author Affiliations +

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347756
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

The method of measurement of two-dimensional flatness of etalons are proposed. Fundamental idea is to measure diameters of interference rings produced on CCD camera. The reproducibility is about (lambda) /1800.

Citation Download Citation

Shin-ichi Itoh, Kentaro Katoh, Tsuyoshi Oikawa, and Jun Chen "Accurate measurement of the flatness of etalons", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347756

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