Measurements of the effective optical constants and the flying height of read-write sliders by heterodyne inteferometry

JuYi Lee; Der-Chin Su; Cheng-Chih Hsu

doi:10.1117/12.347839

7 May 1999 Measurements of the effective optical constants and the flying height of read-write sliders by heterodyne inteferometry

JuYi Lee, Der-Chin Su, Cheng-Chih Hsu

Author Affiliations +

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347839
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

A new method for measuring the effective optical constants and the flying-heights with only an optical set-up by using the heterodyne interferometry is proposed. At first, a set of special equations for describing the relations among the phase differences of s-polarization with respect to p-polarization, the effective optical constants, and the flying-heights, are derived from the Fresnel's equations and the effects of multi- beam interferences. And the effective optical constants can be obtained from the conditions for the extreme points, which can be accurately determined with a heterodyne interferometer. Substituting the optical constants into the special equations which we derived previously, the flying-heights can be estimated.

Citation Download Citation

JuYi Lee, Der-Chin Su, and Cheng-Chih Hsu "Measurements of the effective optical constants and the flying height of read-write sliders by heterodyne inteferometry", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347839

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