Shadow moire profilometry using a phase-shifting method

Lianhua Jin; Yutaka Kodera; Toru Yoshizawa; Yukitoshi Otani

doi:10.1117/12.347777

7 May 1999 Shadow moire profilometry using a phase-shifting method

Lianhua Jin, Yutaka Kodera, Toru Yoshizawa, Yukitoshi Otani

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347777
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

In order to measure 3-D surface of objects by using phase- shifting method, based on shadow moire topography, two stages are planned. The stages are moving the grating vertically, which produces a change in moire pattern; rotating the grating, which results in the constant phase-shift regardless of the moire fringe order. The paper emphasis is on describing the novel method, and justifying it by error simulation test. The experimental results show that this technique is available for some industrial fields.

Citation Download Citation

Lianhua Jin, Yutaka Kodera, Toru Yoshizawa, and Yukitoshi Otani "Shadow moire profilometry using a phase-shifting method", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347777

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