Integration of factory simulation with TCAD process and device simulation within a total TCAD approach to DFM

Vidar K. Nilsen; Anthony J. Walton

doi:10.1117/12.346244

23 April 1999 Integration of factory simulation with TCAD process and device simulation within a total TCAD approach to DFM

Vidar K. Nilsen, Anthony J. Walton

Author Affiliations +

Proceedings Volume 3742, Process and Equipment Control in Microelectronic Manufacturing; (1999) https://doi.org/10.1117/12.346244
Event: Microelectronic Manufacturing Technologies, 1999, Edinburgh, United Kingdom

Abstract

This paper describes the integration of TCAD and factory simulation software tools to help facilitate their adoption as an integral part of a DFM (Design for Manufacturability) strategy. Automated exchange of data enables the impact on manufacturing operations to be more readily considered at an earlier stage during the process design procedure. The paper describes the design and operation of the FASTT (Factory Simulation in Total TCAD) software which integrates two commercially available simulation tools--TWB and ManSim/X. Two examples are used to illustrate its application within a DFM strategy.

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Vidar K. Nilsen and Anthony J. Walton "Integration of factory simulation with TCAD process and device simulation within a total TCAD approach to DFM", Proc. SPIE 3742, Process and Equipment Control in Microelectronic Manufacturing, (23 April 1999); https://doi.org/10.1117/12.346244

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