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13 August 1999 Fault detection in gray-value images of surfaces on different scales
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Proceedings Volume 3744, Interferometry '99: Techniques and Technologies; (1999)
Event: International Conference on Optical Metrology, 1999, Pultusk Castle, Poland
The idea of scaled topometry is to organize systematically different optical measurement techniques with overlapping ranges of resolution in order to receive highly resolved surface information in a wide range of scales. In such a surface inspection system, measurements on different scales of resolution have to be combined by a discrimination algorithm which should be sensitive on faults independent on the scale of resolution. Starting from a global measurement with low resolution certain critical areas have to be detected in which a refined measurements has to be performed. This process of detection and refinement has to be repeated on different scales. The task of the discrimination algorithm should be the detection of critical structures and the determination of the necessary order of refinement in the resolution. For the reason of scale- independence a classical approach using the surface roughness is not suitable.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daniel Kayser, Thorsten Bothe, and Wolfgang Osten "Fault detection in gray-value images of surfaces on different scales", Proc. SPIE 3744, Interferometry '99: Techniques and Technologies, (13 August 1999);

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