Influence of optical imaging on measurements using heterodyne interferometry

Romulad Jozwicki; Tomasz S. Tkaczyk

doi:10.1117/12.357704

13 August 1999 Influence of optical imaging on measurements using heterodyne interferometry

Romulad Jozwicki, Tomasz S. Tkaczyk

Proceedings Volume 3744, Interferometry '99: Techniques and Technologies; (1999) https://doi.org/10.1117/12.357704
Event: International Conference on Optical Metrology, 1999, Pultusk Castle, Poland

Abstract

The subject of the paper is the presentation of a new measurement method with the registration of traveling fringes with the aid of a fast CCD camera and the analysis of the influence of imaging process on the measurement error. Theoretical considerations are supported by computer calculations. The harmonic approach to optical imaging of the object complex amplitude distribution is used to obtain quantitative results.

Citation Download Citation

Romulad Jozwicki and Tomasz S. Tkaczyk "Influence of optical imaging on measurements using heterodyne interferometry", Proc. SPIE 3744, Interferometry '99: Techniques and Technologies, (13 August 1999); https://doi.org/10.1117/12.357704

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