A low-coherence interferometer system for simultaneous measurement of refractive index and thickness ranging from 20 um to a few millimeters

S. Inoue

doi:10.1117/12.2302117

1 September 1999 A low-coherence interferometer system for simultaneous measurement of refractive index and thickness ranging from 20 μm to a few millimeters

S. Inoue

Author Affiliations +

Proceedings Volume 3746, 13th International Conference on Optical Fiber Sensors; 37463J (1999) https://doi.org/10.1117/12.2302117
Event: 13th International Conference on Optical Fiber Sensors, 1999, Kyongju, Korea, Republic of

Abstract

We have developed a computer-controlled low-coherence interferometer system with precise translation stages which is useful in practice for simultaneous measurement of the refractive index and the thickness of transparent plates. Both phase and group indices can be determined automatically in a wide thickness range of 20μm to a few mm. The measurement accuracy of <1% is achieved even when the sample is as thin as 20μm. For the sample of a few hundreds μm or more, the measurement time is 3 minutes with the accuracy of ≦0.2%.

Citation Download Citation

S. Inoue "A low-coherence interferometer system for simultaneous measurement of refractive index and thickness ranging from 20 μm to a few millimeters", Proc. SPIE 3746, 13th International Conference on Optical Fiber Sensors, 37463J (1 September 1999); https://doi.org/10.1117/12.2302117

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