Fabrication of refractive microlens with coding gray-tone mask

Jun Yao; Jingqin Su; Yixiao Zhang; Fuhua Gao; Hui Wei; Yongkang Guo

doi:10.1117/12.354999

19 July 1999 Fabrication of refractive microlens with coding gray-tone mask

Jun Yao, Jingqin Su, Yixiao Zhang, Fuhua Gao, Hui Wei, Yongkang Guo

Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.354999
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States

Abstract

The fabrication of refractive microlens by introducing the melting process with coding gray-tone mask is reported. The applied mask is obtained by the coding method, nonlinear effects in intensity distribution through the gray-tone mask have been taken into account to correct the mask design. A continuous relief is formed in photoresist after exposing, and then the excellent surface shape microlens can be gained by melting. The technical parameters of this process are also presented. Results are presented for experiments and evaluated by profile meter and scanning electronic microscope. The fabrication technology of refractive microlens by this process is simple and it indicates the enormous potential to extend the fabrication range ofrefractive microlens.

Citation Download Citation

Jun Yao, Jingqin Su, Yixiao Zhang, Fuhua Gao, Hui Wei, and Yongkang Guo "Fabrication of refractive microlens with coding gray-tone mask", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.354999

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