Limitations of the confocal imaging algorithm in surface profiling

J. Felix Aguilar; Colin J. R. Sheppard

doi:10.1117/12.354848

19 July 1999 Limitations of the confocal imaging algorithm in surface profiling

Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.354848
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States

Abstract

Based on the capability of confocal microscopy to profile rough surfaces, Quartel and Sheppard have proposed an algorithm to reconstruct surface profiles from scattering data. We determine the range of applicability of the algorithm by investigating the effects of the roughness and correlation length of a random surface on the reconstruction.

Citation Download Citation

J. Felix Aguilar and Colin J. R. Sheppard "Limitations of the confocal imaging algorithm in surface profiling", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.354848

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