Paper
19 July 1999 Straightness measurements using a reflection confocal optical system
Kiyofumi Matsuda, Tomoaki Eiju, Maitreyee Roy, John W. O'Byrne, Pal W. Fekete, Colin J. R. Sheppard
Author Affiliations +
Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.354902
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States
Abstract
Straightness measurement is a very important technique in the field of mechanical engineering. A particular application would be very high accuracy machining on a diamond turning lathe. In this paper a novel optical method for measuring straightness of motion using reflection confocal optics is proposed. The advantage of this method in comparison with the transmission optical systems used by Burch and Williams is that the lateral displacements in the direction of the two axes perpendicular to the optical axis, and the rotation angles around all three axes, can be measured simultaneously. This can be very useful for straightness measurement. Also, reflection optical systems are more compact in length.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kiyofumi Matsuda, Tomoaki Eiju, Maitreyee Roy, John W. O'Byrne, Pal W. Fekete, and Colin J. R. Sheppard "Straightness measurements using a reflection confocal optical system", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.354902
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Cited by 3 scholarly publications.
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KEYWORDS
Confocal microscopy

Position sensors

Beam splitters

Motion measurement

Geometrical optics

Mirrors

Mechanical engineering

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