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19 July 1999 Stroboscopic phase-shifting interferometry for dynamic characterization of optical MEMS
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Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.354838
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States
Abstract
Macro-scale optical components with surface flatness better than 25 nm over large areas (more than 1 X 1 mm) are widely available. However, the flatness of optical MEMS devices (for example micro-mirrors and -diffraction gratings) is often considerably worse. In addition to static deformation caused by film stresses and stress gradients, dynamic mechanical effects, such as air drag and excitation of higher-order resonant modes, cause surface deformations that are difficult to predict using theoretical or finite- element models. These deformations can cause significant degradation to optical performance. Dynamic measurements of nanometer-scale displacements across the entire surface of a micro-mirror are difficult or impossible to perform with conventional MEMS metrology techniques such as SEM, AFM, and optical microscopy. Stroboscopic interferometry, however, can be used to measure time-slice images that show 3D motion of fast-moving MEMS devices, with vertical resolution better than 1 nm. In this paper, we report the application of this technique to dynamic characterization of fold-up surface- micromachined structures and show how the method can be used to provide new insights into the optical and mechanical behavior of scanning micro-mirror devices.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Matthew Richard Hart, Robert A. Conant, Kam Y. Lau, and Richard S. Muller "Stroboscopic phase-shifting interferometry for dynamic characterization of optical MEMS", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.354838
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