Calibration procedures for a two-modular generalized ellipsometer

Gerald E. Jellison Jr.; Frank A. Modine; Chi Chen

doi:10.1117/12.366357

25 October 1999 Calibration procedures for a two-modular generalized ellipsometer

Gerald E. Jellison Jr., Frank A. Modine, Chi Chen

Proceedings Volume 3754, Polarization: Measurement, Analysis, and Remote Sensing II; (1999) https://doi.org/10.1117/12.366357
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

A Two-Modulator Generalized Ellipsometer (2-MGE) has been extremely useful in characterizing optical properties of uniaxial bulk materials, thin films and diffraction gratings. The instrument consists of two polarizer- photoelastic modulator pairs, one operating as the polarization state generator and the other as the polarization state detector. Each photoelastic modulator operates at a different resonant frequency, making it possible to measure eight elements of the reduced sample; Mueller matrix simultaneously. In certain configurations, light reflection from non-depolarizing anisotropic samples can be completely characterized by a single measurement, and the entire reduced Jones matrix can be determined, including the cross polarization coefficients. The calibration of the instrument involves the measurement of the azimuthal angle of the polarizer with respect to the modulator, the modulation amplitude, and the modulator strain for each polarizer photoelastic modulator pair, where the lat two are functions of wavelengths. In addition, it is essential to calibrate the azimuthal modulator pair, where the lat two are functions of wavelengths. In addition, it is essential to calibrate the azimuthal angles of the polarization state generator and the polarization state detector with respect to the plane of incidence in the ellipsometry configuration that is used in the measurements. Because two modulators operating at different frequencies are used, these calibrations are actually easier and more accurate than for one modulator ellipsometers. In this paper, we will discuss these calibrations and the resultant accuracy limitations of the 2-MGE.

Citation Download Citation

Gerald E. Jellison Jr., Frank A. Modine, and Chi Chen "Calibration procedures for a two-modular generalized ellipsometer", Proc. SPIE 3754, Polarization: Measurement, Analysis, and Remote Sensing II, (25 October 1999); https://doi.org/10.1117/12.366357

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