FT-IR-based ellipsometer using high-quality Brewster-angle polarizers

Simon G. Kaplan; Leonard M. Hanssen

doi:10.1117/12.366338

25 October 1999 FT-IR-based ellipsometer using high-quality Brewster-angle polarizers

Simon G. Kaplan, Leonard M. Hanssen

Proceedings Volume 3754, Polarization: Measurement, Analysis, and Remote Sensing II; (1999) https://doi.org/10.1117/12.366338
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

A Fourier transform IR spectrometer-based broadband IR ellipsometer has been developed around a pair of high- quality Brewster angle polarizers. These polarizers consist of four Ge plates in a chevron geometry and have been measured to have extinction ratios of less than 10^-5 in the IR spectral region. The ellipsometer can be used in transmission or reflection mode for angles of incidence of 10⁰ to near grazing. We describe the design and construction of the ellipsometer and initial testing of the system using measurements on Si wafers from 2 micrometers to 12 micrometers wavelength. 5

Citation Download Citation

Simon G. Kaplan and Leonard M. Hanssen "FT-IR-based ellipsometer using high-quality Brewster-angle polarizers", Proc. SPIE 3754, Polarization: Measurement, Analysis, and Remote Sensing II, (25 October 1999); https://doi.org/10.1117/12.366338

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