Relative variation of stress-optic coefficient with wavelength in fused silica and calcium fluoride

Theodore C. Oakberg

doi:10.1117/12.366332

25 October 1999 Relative variation of stress-optic coefficient with wavelength in fused silica and calcium fluoride

Theodore C. Oakberg

Proceedings Volume 3754, Polarization: Measurement, Analysis, and Remote Sensing II; (1999) https://doi.org/10.1117/12.366332
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Birefringence in refractive components such as lenses has become an increasingly serious problem in semiconductor lithography as exposure wavelength decreases. Most measurements of birefringence are made with visible light but the light used for photolithography is in the UV and deep UV spectral regions. Measurements of the relative variation of stress-optic constants have been made for fused silica and calcium fluoride, the two primary transmissive optical materials used by this industry.

Citation Download Citation

Theodore C. Oakberg "Relative variation of stress-optic coefficient with wavelength in fused silica and calcium fluoride", Proc. SPIE 3754, Polarization: Measurement, Analysis, and Remote Sensing II, (25 October 1999); https://doi.org/10.1117/12.366332

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