Adaptive optic correction using silicon-based deformable mirros

Julie A. Perreault; Thomas G. Bifano; Bruce Martin Levine

doi:10.1117/12.367582

3 November 1999 Adaptive optic correction using silicon-based deformable mirros

Julie A. Perreault, Thomas G. Bifano, Bruce Martin Levine

Proceedings Volume 3760, High-Resolution Wavefront Control: Methods, Devices, and Applications; (1999) https://doi.org/10.1117/12.367582
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

A micromachined deformable mirror ((mu) -DMs) for optical wavefront correction is described. Design and manufacturing approaches for (mu) -DMs are detailed. The (mu) -DM employs a flexible silicon membrane supported by mechanical attachments to an array of electrostatic parallel plate actuators. Devices are fabricated through surface micromachining using polycrystalline silicon thin films. (mu) -DM membranes measuring 2 mm X 2 mm X 2 micrometers , supported by 100 actuators are described. Figures of merit include stroke of 2 micrometers , resolution of 10 nm, and frequency bandwidth DC - 7 kHz. The devices are compact, inexpensive to fabricate, exhibit no hysteresis, and use only a small fraction of the power required for conventional DMs. Performance of an adaptive optics system using a (mu) - DM was characterized in a closed-loop control experiment. Significant reduction in quasi-static wavefront phase error was achieved. Advantages and limitations of (mu) -DMs are described, in relation to conventional adaptive optics systems and to emerging applications of adaptive optics, such as high resolution correction, small aperture systems, and optical communication.

Citation Download Citation

Julie A. Perreault, Thomas G. Bifano, and Bruce Martin Levine "Adaptive optic correction using silicon-based deformable mirros", Proc. SPIE 3760, High-Resolution Wavefront Control: Methods, Devices, and Applications, (3 November 1999); https://doi.org/10.1117/12.367582

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