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27 September 1999 Membrane deformable mirrors under cw laser load
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Behavior of micromachined membrane deformable mirrors under continuous laser load has been investigated experimentally and theoretically. It was shown that load-induced variation of the membrane temperature and mechanical tension result in addition thermal deformation of the deformable mirror figure. Modeling the membrane tension and thermal deformation as functions of beam diameter, optical power and mirror design parameters, we found that the thermal resistance of the mirror substrate is critical for high- power operation. According to our estimations an optically- designed membrane mirror with 99.8 percent reflectivity can be safely loaded with up to 500W of optical power in a 10mm- diameter beam. This model was compared with experimental data obtained for micro-machined membrane deformable mirrors with five different types of reflective coatings loaded with up to 70W beam with power density of up to 20W/mm2. We also demonstrated operation of a multilayer membrane mirror in a stable resonator of a diode-pumped YAG:Nd laser with output power of up to 4.5W.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gleb V. Vdovin, Nicolas Kugler, and Martin Schacht "Membrane deformable mirrors under cw laser load", Proc. SPIE 3762, Adaptive Optics Systems and Technology, (27 September 1999);


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