Fabrication of self-supporting transmission gratings for plasma diagnostics

Xiangdong Xu; Yilin Hong; Yangchao Tian; Tonglin Huo; Hongjun Zhou; Xiaoming Tao; Shiping Jiang; Shaojun Fu

doi:10.1117/12.363652

29 September 1999 Fabrication of self-supporting transmission gratings for plasma diagnostics

Xiangdong Xu, Yilin Hong, Yangchao Tian, Tonglin Huo, Hongjun Zhou, Xiaoming Tao, Shiping Jiang, Shaojun Fu

Proceedings Volume 3766, X-Ray Optics, Instruments, and Missions II; (1999) https://doi.org/10.1117/12.363652
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

With holographic-ion beam etching technique, a number of self-supporting transmission gratings have been fabricated for inertial confinement fusion diagnosis. In addition to the general process, a practical method for monitoring the evolution of the grating structures exposed in photoresist during development of the resist. The real-time monitor technique developed here is relatively simple in comparison with a He-Ne laser and detector, which needs delicate control.

Citation Download Citation

Xiangdong Xu, Yilin Hong, Yangchao Tian, Tonglin Huo, Hongjun Zhou, Xiaoming Tao, Shiping Jiang, and Shaojun Fu "Fabrication of self-supporting transmission gratings for plasma diagnostics", Proc. SPIE 3766, X-Ray Optics, Instruments, and Missions II, (29 September 1999); https://doi.org/10.1117/12.363652

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