Progress in the development of three-aspherical mirror optics for EUVL

Hiroo Kinoshita; Takeo Watanabe; Daniel J. Bajuk; Jay P. Daniel; Yachiyo Kimpara; Michael D. Kriese; Yuriy Ya. Platonov

doi:10.1117/12.371114

23 November 1999 Progress in the development of three-aspherical mirror optics for EUVL

Hiroo Kinoshita, Takeo Watanabe, Daniel J. Bajuk, Jay P. Daniel, Yachiyo Kimpara, Michael D. Kriese, Yuriy Ya. Platonov

Proceedings Volume 3767, EUV, X-Ray, and Neutron Optics and Sources; (1999) https://doi.org/10.1117/12.371114
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

A three-aspherical mirror system for extreme ultraviolet lithography (EUVL) has been developed. The mirrors were fabricated using a computer-controlled optical surfacing (CCOS) process and a phase-shift interferometer. The figure error of the mirrors is 0.58 nm. To achieve a high reflectivity in the clear aperture, Mo/Si multilayer films with an optimized d-spacing were successfully deposited on the mirrors. These results show that we have nearly achieved the target specifications for EUVL mirrors.

Citation Download Citation

Hiroo Kinoshita, Takeo Watanabe, Daniel J. Bajuk, Jay P. Daniel, Yachiyo Kimpara, Michael D. Kriese, and Yuriy Ya. Platonov "Progress in the development of three-aspherical mirror optics for EUVL", Proc. SPIE 3767, EUV, X-Ray, and Neutron Optics and Sources, (23 November 1999); https://doi.org/10.1117/12.371114

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available