Testing of glancing incidence mirrors using sampled profile measurements

Eugene L. Church; Peter Z. Takacs

doi:10.1117/12.371108

23 November 1999 Testing of glancing incidence mirrors using sampled profile measurements

Eugene L. Church, Peter Z. Takacs

Proceedings Volume 3767, EUV, X-Ray, and Neutron Optics and Sources; (1999) https://doi.org/10.1117/12.371108
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

This paper reports on the development of a deterministic method of specifying the finish glancing-incidence mirrors in terms of their imaging performance. As a first step we have calculated the two-dimensional intensity distribution in the focal region of an elliptical mirror including the effects of small, arbitrary finish errors. This calculation is based on the physical-optics diffraction model, using the sampling theorem to interpolate between measured profile points, thereby avoiding numerical integration and leading to simple analytic results. In addition to giving deterministic image intensity distributions for particular profile data, it provides a means for validating and extending earlier test methods based on profile statistics -- the root-mean-square (RMS) finish error and its power-spectral density (PSD).

Citation Download Citation

Eugene L. Church and Peter Z. Takacs "Testing of glancing incidence mirrors using sampled profile measurements", Proc. SPIE 3767, EUV, X-Ray, and Neutron Optics and Sources, (23 November 1999); https://doi.org/10.1117/12.371108

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