Applications of high-repetition-rate tabletop soft x-ray laser: laser ablation with a focused beam and reflectometry of materials

Brady R. Benware; Jorge J. G. Rocca; A. Ozols; Christopher D. Macchietto; Juan L. A. Chilla; Igor A. Artioukov; Yuriy S. Kasjanov; V. V. Kondratenko; Alexander V. Vinogradov

doi:10.1117/12.366670

21 October 1999 Applications of high-repetition-rate tabletop soft x-ray laser: laser ablation with a focused beam and reflectometry of materials

Brady R. Benware, Jorge J. G. Rocca, A. Ozols, Christopher D. Macchietto, Juan L. A. Chilla, Igor A. Artioukov, Yuriy S. Kasjanov, V. V. Kondratenko, Alexander V. Vinogradov

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Proceedings Volume 3776, Soft X-Ray Lasers and Applications III; (1999) https://doi.org/10.1117/12.366670
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

We report the first applications of a soft x-ray laser in materials processing and diagnostics. We have focused a Ne- like Ar capillary discharge laser ((lambda) equals 46.9 nm) operating at a repetition rate of 1 Hz using a spherical Si/Sc multilayer coated mirror. The energy density obtained significantly exceeded the threshold for the ablation of metals. Ablation of stainless steel, aluminum and brass samples is reported. The laser ablation patterns on brass were used in combination with ray tracing computations to characterize the focused beam. The radiation intensity within the 2 micrometers central region of the focal spot is estimated to be is congruent to 10¹¹ W/cm², with a corresponding energy density of is congruent to 100J/cm². In a separate experiment we have conducted laser reflectometry measurements for a number of different samples. These measurements resulted in the characterization of the reflectivity of Si/Sc multilayer mirrors as a function of angle and in the determination of optical constants for Si, GaP, InP, GaAs, GaAsP and Ir. The measurements of InP and GaAsP resulted in the first experimental values to our knowledge for these materials at this wavelength.

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Brady R. Benware, Jorge J. G. Rocca, A. Ozols, Christopher D. Macchietto, Juan L. A. Chilla, Igor A. Artioukov, Yuriy S. Kasjanov, V. V. Kondratenko, and Alexander V. Vinogradov "Applications of high-repetition-rate tabletop soft x-ray laser: laser ablation with a focused beam and reflectometry of materials", Proc. SPIE 3776, Soft X-Ray Lasers and Applications III, (21 October 1999); https://doi.org/10.1117/12.366670

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KEYWORDS

Laser ablation

Reflectivity

Mirrors

X-ray lasers

Reflectometry

Capillaries

Scanning electron microscopy

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