3D profilometry based on the white light interferometer for rough surfaces

Seok-moon Ryoo; Yeong Kyeong Seong; Tae-Sun Choi

doi:10.1117/12.369215

11 November 1999 3D profilometry based on the white light interferometer for rough surfaces

Seok-moon Ryoo, Yeong Kyeong Seong, Tae-Sun Choi

Proceedings Volume 3782, Optical Manufacturing and Testing III; (1999) https://doi.org/10.1117/12.369215
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

A new approach to 3-D profilometry for the white light interferometer is presented. Recently many different methods have been used to analyze the data obtained from white light interferometric profilers. The advantage of the interferometric methods is their precision that can reach a small fraction of a wavelength. But these profilers are usually limited to relatively smooth surfaces as well as being very expensive. We detail a simple way to construct a profiler that uses a simple and efficient algorithm. It treats the data in a fast and simple manner, thus reducing both the acquisition and the analysis time. The method is based on the Focus measurement that finds a maximum variance value. The method works well with rough surfaces.

Citation Download Citation

Seok-moon Ryoo, Yeong Kyeong Seong, and Tae-Sun Choi "3D profilometry based on the white light interferometer for rough surfaces", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); https://doi.org/10.1117/12.369215

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KEYWORDS

Interferometers

Interferometry

Mirau interferometers

3D acquisition

Phase shifts

3D modeling

Objectives

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