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11 November 1999 Knife-edge test for characterization of subnanometer deformations in micro-optical surfaces
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Development of accurate surface characterization methods is essential for testing micro-optical components, such as micro- opto-electro-mechanical systems (MOEMS), for use in complex optical systems. We consider using an array of 16 micrometer- wide micro-mirrors as programmable slits for astronomical multi-object spectroscopy, and propose a new method based upon Foucault's knife-edge test to characterize local surface deformations of individual micro-mirrors. By measuring local slopes, the surface shape of each mirror in a micro-mirror array has been reconstructed with a sub-nanometer accuracy. In addition to low-order deformation (tilt, curvature, astigmatism), each mirror is seen to be palm-tree shaped. We have checked the validity of our knife-edge test by the micro- characterization of a conventional spherical mirror.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Frederic Zamkotsian, Kjetil Dohlen, Patrick Lanzoni, Silvio P. Mazzanti, Marie-Laurence Michel, Veronique Buat, and Denis Burgarella "Knife-edge test for characterization of subnanometer deformations in micro-optical surfaces", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999);

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