McCarter Superfinish for silicon

Frank M. Anthony; Douglas R. McCarter; Jeff L. Bertelsen; Matt Tangedahl

doi:10.1117/12.369223

11 November 1999 McCarter Superfinish for silicon

Frank M. Anthony, Douglas R. McCarter, Jeff L. Bertelsen, Matt Tangedahl

Proceedings Volume 3782, Optical Manufacturing and Testing III; (1999) https://doi.org/10.1117/12.369223
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

At the 1998 ASPE Meeting in Carmel, California there was much discussion of surface and subsurface damage introduced into silicon by machining operations. Many investigators have studied the problem and have defined parameters of importance. Yet there is a need for costly and time-consuming post- machining operations, such as lapping, if items of highest quality are to be produced. Significant cost reductions should be possible with machining techniques that introduce minimal damage. The combination of tool selection and treatment, speed and feed parameters, coolant choice and talent has resulted in the improved machining process. This process reduces damage without increasing machining cost. Although the McCarter Superfinish is a proprietary procedure the resulting surface condition will be compared with that of conventional machining. Data supplied by a customer is the basis for the comparison.

Citation Download Citation

Frank M. Anthony, Douglas R. McCarter, Jeff L. Bertelsen, and Matt Tangedahl "McCarter Superfinish for silicon", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); https://doi.org/10.1117/12.369223

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