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11 November 1999 Three-dimensional surface profilometry using structured liquid crystal grating
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Abstract
This paper describes a device for measuring the three dimensional surface profile using a grating projection method. A phase shifting technique without any mechanical moving is expected for profile analysis. A grating that is a key component in this technique is made using an active controlled liquid crystal (LC). This LC grating has the performances of more than 8 bits of gray levels and its grating period is 50 micro-meters per line without any colored filters. Surface profiles of some samples are measured for the demonstration of the system.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ken Yamatani, Hiroo Fujita, Masayuki Yamamoto, Akira Suguro, Yukitoshi Otani, Shigeru Morokawa, and Toru Yoshizawa "Three-dimensional surface profilometry using structured liquid crystal grating", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); https://doi.org/10.1117/12.369195
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