Two-axis micromirror scanner

Michael D. Johnson; Nicolas G. Loebel; Mark L. Gitlin; Norman F. Paradise

doi:10.1117/12.351659

2 July 1999 Two-axis micromirror scanner

Michael D. Johnson, Nicolas G. Loebel, Mark L. Gitlin, Norman F. Paradise

Proceedings Volume 3787, Optical Scanning: Design and Application; (1999) https://doi.org/10.1117/12.351659
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Two-axis scanning is generally accomplished using two separate single-axis scanners. In order to improve the functionality of a dual-axis scanning system and eliminate aperture transfer problems, MedCam, Inc. has developed a two-axis single deflector scanner using MEMS and micromachining techniques. Various configurations of the MedCam microscanner have demonstrated large scan angles at high scan rates with aperture diameters ranging from 1 mm to 10 mm. The scanner is extremely compact and may be used in small, portable applications.

Citation Download Citation

Michael D. Johnson, Nicolas G. Loebel, Mark L. Gitlin, and Norman F. Paradise "Two-axis micromirror scanner", Proc. SPIE 3787, Optical Scanning: Design and Application, (2 July 1999); https://doi.org/10.1117/12.351659

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