Glancing angle deposition: recent research results

Michael J. Brett; Mary W. Seto; Jeremy C. Sit; Ken D. Harris; Doug Vick; Kevin Robbie

doi:10.1117/12.351243

30 June 1999 Glancing angle deposition: recent research results

Michael J. Brett, Mary W. Seto, Jeremy C. Sit, Ken D. Harris, Doug Vick, Kevin Robbie

Proceedings Volume 3790, Engineered Nanostructural Films and Materials; (1999) https://doi.org/10.1117/12.351243
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Unique thin film microstructures have been fabricated with the Glancing Angle Deposition (GLAD) technique. These porous, thin films can be engineered with a variety of different morphologies to sub-micron dimensions, including helical, post, and chevron or zigzag microstructures. This paper reports some recent results in study and application of films deposited using GLAD, namely: the use of low pressure, long throw sputtering to produce porous titanium films; deposition of porous, structured ZrO₂ films for use as thermal barriers; and measurement of the mechanical response of chiral or `microspring' thin films.

Citation Download Citation

Michael J. Brett, Mary W. Seto, Jeremy C. Sit, Ken D. Harris, Doug Vick, and Kevin Robbie "Glancing angle deposition: recent research results", Proc. SPIE 3790, Engineered Nanostructural Films and Materials, (30 June 1999); https://doi.org/10.1117/12.351243

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