MEMS millimeter-wave reconfigurable components

Jung-Chih Chiao; Yiton Fu; Iao Mak Chio; Shengyong Cheng; Yoosin Kang

doi:10.1117/12.370211

12 November 1999 MEMS millimeter-wave reconfigurable components

Jung-Chih Chiao, Yiton Fu, Iao Mak Chio, Shengyong Cheng, Yoosin Kang

Proceedings Volume 3795, Terahertz and Gigahertz Photonics; (1999) https://doi.org/10.1117/12.370211
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

We present microelectromechanical system (MEMS) RF component architectures that enable reconfigurable MEMS millimeterwave transceivers. In this paper, we focus on the component architectures for system integration. Different components, including reconfigurable Vee-antennas, planar impedance tuners, microswitches and variable capacitors, are demonstrated using the same three-polysilicon-layer processes. The reconfigurability of the Vee-antenna is demonstrated with beam-steering and beam-shaping functionality. The tuning ranges of planar backshort impedance tuners on different transmission lines are studied. We show that it is feasible to integrate the reconfigurable Vee-antenna with the planar impedance tuners. The mechanical architectures for microswitches, parallel- plate variable capacitors and circular variable capacitors are also investigated.

Citation Download Citation

Jung-Chih Chiao, Yiton Fu, Iao Mak Chio, Shengyong Cheng, and Yoosin Kang "MEMS millimeter-wave reconfigurable components", Proc. SPIE 3795, Terahertz and Gigahertz Photonics, (12 November 1999); https://doi.org/10.1117/12.370211

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