Holographic 3D imaging of microstructures

Michal Balberg; George Barbastathis; David J. Brady; Bo Kyoung Choi; Chang Liu

doi:10.1117/12.363933

20 September 1999 Holographic 3D imaging of microstructures

Michal Balberg, George Barbastathis, David J. Brady, Bo Kyoung Choi, Chang Liu

Proceedings Volume 3801, Photorefractive Fiber and Crystal Devices: Materials, Optical Properties, and Applications V; (1999) https://doi.org/10.1117/12.363933
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

A volume holographic matched filter is used for three- dimensional imaging of silicon microstructures. The filter is designed by recording a hologram that is matched to the object depth, allowing confocal imaging of the structure. Confocal imaging of micro devices provides the capability to image the performance of the device, which is not possible in scanning- electron-microscopes (SEM). A matched holographic filter can also provide more information about the device than regular confocal imaging. We present a scanned image of a silicon wafer with micro-fabricated trenches.

Citation Download Citation

Michal Balberg, George Barbastathis, David J. Brady, Bo Kyoung Choi, and Chang Liu "Holographic 3D imaging of microstructures", Proc. SPIE 3801, Photorefractive Fiber and Crystal Devices: Materials, Optical Properties, and Applications V, (20 September 1999); https://doi.org/10.1117/12.363933

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