Step-height metrology for data storage applications

Rainer G.J. Koening; Ronald G. Dixson; Joseph Fu; Brian T. Renegar; Theodore V. Vorburger; Vincent Wen-Chieh Tsai; Michael T. Postek Jr.

doi:10.1117/12.371161

30 November 1999 Step-height metrology for data storage applications

Rainer G.J. Koening, Ronald G. Dixson, Joseph Fu, Brian T. Renegar, Theodore V. Vorburger, Vincent Wen-Chieh Tsai, Michael T. Postek Jr.

Author Affiliations +

Proceedings Volume 3806, Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks; (1999) https://doi.org/10.1117/12.371161
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

The measurement of bump heights and pit depth on compact discs (CD) with atomic force microscopes (AFMs) is quite different from the measurement of step heights on step height calibration standards. Both the bumps and the pits show much larger transition regimes and more structural irregularities. The irregularities disqualify the effective use of profile based algorithms, which minimize the influence of any remaining motion deviations of the scan apparatus, to determine the height. Therefore a histogram height algorithm has to be used. The results of the bump height and pit depth measurements varied about 20 nm over the different sample regions. The remaining approximately 30 nm difference between the average of the bump height and pit depth is believed to result from the sample preparation procedure. By itself, the large sample variation observed will result in rather large measurement uncertainties for the measurement of the average height and depth of these features, if the averaging does not include a large amount of data taken at many different sample positions.

Citation Download Citation

Rainer G.J. Koening, Ronald G. Dixson, Joseph Fu, Brian T. Renegar, Theodore V. Vorburger, Vincent Wen-Chieh Tsai, and Michael T. Postek Jr. "Step-height metrology for data storage applications", Proc. SPIE 3806, Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks, (30 November 1999); https://doi.org/10.1117/12.371161

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