Laser ablation and microstructuring of Si-containing polycarbonates and polyestercarbonates

J. Wei; Juergen Stebani; Thilo Kunz; Christina Hahn; Thomas Lippert; Alexander J. Wokaun

doi:10.1117/12.364224

20 September 1999 Laser ablation and microstructuring of Si-containing polycarbonates and polyestercarbonates

J. Wei, Juergen Stebani, Thilo Kunz, Christina Hahn, Thomas Lippert, Alexander J. Wokaun

Proceedings Volume 3822, Computer-Controlled Microshaping; (1999) https://doi.org/10.1117/12.364224
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany

Abstract

Si-containing polymers, which act as RIE-resists by generating a passivating SiO₂ film on the polymer surfaces, are applied in microlithographic processes. New Si-containing polymers, i.e., Si-containing polycarbonates and polyestercarbonates have been synthesized. Various contents of Si (up to 30 wt%) were incorporated into the polymers. Thin films (about 100 micrometers thick) of the polymers were prepared for ablation and microstructuring at 308 nm. With a pinhole mask and a lens, a 10 X 10 matrix of circular craters was created on the polymer films. The fluence and number of pulses were varied for each crater. Ablation parameters (alpha) _eff (effective absorption coefficient) and F_th (threshold fluence) were determined for each polymer. Using a reflecting objective (Schwarzschild type), microstructures with a sub-micron resolution can be produced on the polymer films. The quality of the ablated structures was evaluated by scanning electron microscopy. The incorporation of Si into polymers does not affect the ablation behavior of the polymers. Si-containing polyestercarbonates exhibited good ablation behavior, while surface swelling (incubation) was observed for polycarbonates films. The results from this work includes that Si-containing polyestercarbonates are suitable for laser ablation and microstructuring.

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J. Wei, Juergen Stebani, Thilo Kunz, Christina Hahn, Thomas Lippert, and Alexander J. Wokaun "Laser ablation and microstructuring of Si-containing polycarbonates and polyestercarbonates", Proc. SPIE 3822, Computer-Controlled Microshaping, (20 September 1999); https://doi.org/10.1117/12.364224

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KEYWORDS

Polymers

Silicon

Laser ablation

Absorption

Scanning electron microscopy

Etching

Carbon dioxide

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