Correction of cyclic error in optical waveguide distance meter

Ichiro Fujima; Katuo Seta; Shige Iwasaki; Hideaki Yoshimori

doi:10.1117/12.360974

9 September 1999 Correction of cyclic error in optical waveguide distance meter

Ichiro Fujima, Katuo Seta, Shige Iwasaki, Hideaki Yoshimori

Proceedings Volume 3823, Laser Metrology and Inspection; (1999) https://doi.org/10.1117/12.360974
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany

Abstract

Sinusoidal modulation method is utilized in optical distance meters. In this method, the phase delay of the returned beam is measured with high resolution. One of the dominant error factors in the phase measurement is cyclic error. We have already reported on a cyclic error compensation of an optical waveguide distance meter using a preliminary phase measurement with mechanical displacement. In this paper, a new technique of the cyclic error compensation is described, which is based on the modulation frequency scanning of the waveguide distance meter around 14 GHz. We have compared two types of cyclic error curves; one was obtained from the data during the displacement of the target and the other was obtained from the data during the scanning of the modulation frequency. The curve fitting technique was used to determine the amplitude and the phase of the cyclic error component for the two curves. We have obtained almost the same values for both parameters of the amplitude and the phase for the two cyclic error curves. Therefore, the cyclic error curve obtained from the data of frequency scanning can be utilized for the cyclic error compensation instead of the displacement of the target.

Citation Download Citation

Ichiro Fujima, Katuo Seta, Shige Iwasaki, and Hideaki Yoshimori "Correction of cyclic error in optical waveguide distance meter", Proc. SPIE 3823, Laser Metrology and Inspection, (9 September 1999); https://doi.org/10.1117/12.360974

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Modulation

Phase shift keying

Phase measurement

Waveguides

Mirrors

Modulators

Interferometers

Show All Keywords

Keywords/Phrases

Search In:

Publication Years