Development of a hightly transparent fluorescent optical sensor for transverse positioning of multiple elements with respect to a reference laser beam

J.-Ch. Barriere; H. Blumenfeld; Michel J. Bourdinaud; O. Cloue; F. Molinie; Phillippe Schune

doi:10.1117/12.360989

9 September 1999 Development of a hightly transparent fluorescent optical sensor for transverse positioning of multiple elements with respect to a reference laser beam

J.-Ch. Barriere, H. Blumenfeld, Michel J. Bourdinaud, O. Cloue, F. Molinie, Phillippe Schune

Author Affiliations +

Proceedings Volume 3823, Laser Metrology and Inspection; (1999) https://doi.org/10.1117/12.360989
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany

Abstract

A new type of highly transparent (95%) two dimensional position sensor has been developed which allows the accurate positioning (below 10 micrometers r.m.s.) of successive elements to which each sensor is attached, transversely to a laser beam used as a reference straight line. The present useful area of the sensor is about 15 X 15 mm², and can be further increased.

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J.-Ch. Barriere, H. Blumenfeld, Michel J. Bourdinaud, O. Cloue, F. Molinie, and Phillippe Schune "Development of a hightly transparent fluorescent optical sensor for transverse positioning of multiple elements with respect to a reference laser beam", Proc. SPIE 3823, Laser Metrology and Inspection, (9 September 1999); https://doi.org/10.1117/12.360989

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