High-speed optical 3D roughness measurements

Robert Windecker; Stefan Franz; Hans J. Tiziani

doi:10.1117/12.364244

21 September 1999 High-speed optical 3D roughness measurements

Robert Windecker, Stefan Franz, Hans J. Tiziani

Proceedings Volume 3824, Optical Measurement Systems for Industrial Inspection; (1999) https://doi.org/10.1117/12.364244
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany

Abstract

A set-up based on a zoom stereo microscope is presented which can be used for fast and robust microstructure analysis on engineering surfaces. A fringe projection technique with an optimized grating pattern is used to determine the third dimension of the specimen. Due to the zoom objective the set- up can be quickly adapted to different fields of view. The magnification dependent vertical resolution can be as high as 0.1 micrometer with measuring times of less than a few seconds for 768 X 568 pixels. This very high speed together with the flexibility of the set-up is of great advantage for tribological investigations of metal sheets for example. After a brief description of the set-up and the algorithms used for the measurement evaluation, the mains emphasize is given for the application of the fringe projection technique to the determination of roughness parameters. Conditions like the optimal size of the field of view and others are given. In particular we give some studies for the comparability to a tactile sensor and to other optical sensors like white-light interferometry and confocal microscopy and present results of measurements on metal sheets and paper.

Citation Download Citation

Robert Windecker, Stefan Franz, and Hans J. Tiziani "High-speed optical 3D roughness measurements", Proc. SPIE 3824, Optical Measurement Systems for Industrial Inspection, (21 September 1999); https://doi.org/10.1117/12.364244

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KEYWORDS

Sensors

Optical testing

Confocal microscopy

Metals

3D metrology

Optical sensors

Interferometry

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